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Real-time monitoring of semiconductor growth by spectroscopic ellipsometry
B. Johs, J. Hale, C. Herzinger, D. Doctor, K. Elliott, G. Olson, D. Chow, J. Roth, I. Ferguson, M. Pelczynski, C. H. Kuo, S. Johnson
Research output: Contribution to journal › Conference article
13
Scopus
citations