Real-time monitoring of semiconductor growth by spectroscopic ellipsometry

B. Johs, J. Hale, C. Herzinger, D. Doctor, K. Elliott, G. Olson, D. Chow, J. Roth, I. Ferguson, M. Pelczynski, C. H. Kuo, S. Johnson

Research output: Contribution to journalConference article

13 Scopus citations

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy