Silicon Micro- and Nanofabrication for Medicine

Daniel Fine, Alessandro Grattoni, Randy Goodall, Shyam S. Bansal, Ciro Chiappini, Sharath Hosali, Anne L. van de Ven, Srimeenkashi Srinivasan, Xuewu Liu, Biana Godin, Louis Brousseau, Iman K. Yazdi, Joseph Fernandez-Moure, Ennio Tasciotti, Hung Jen Wu, Ye Hu, Steve Klemm, Mauro Ferrari

Research output: Contribution to journalReview article

46 Citations (Scopus)

Abstract

This manuscript constitutes a review of several innovative biomedical technologies fabricated using the precision and accuracy of silicon micro- and nanofabrication. The technologies to be reviewed are subcutaneous nanochannel drug delivery implants for the continuous tunable zero-order release of therapeutics, multi-stage logic embedded vectors for the targeted systemic distribution of both therapeutic and imaging contrast agents, silicon and porous silicon nanowires for investigating cellular interactions and processes as well as for molecular and drug delivery applications, porous silicon (pSi) as inclusions into biocomposites for tissue engineering, especially as it applies to bone repair and regrowth, and porous silica chips for proteomic profiling. In the case of the biocomposites, the specifically designed pSi inclusions not only add to the structural robustness, but can also promote tissue and bone regrowth, fight infection, and reduce pain by releasing stimulating factors and other therapeutic agents stored within their porous network. The common material thread throughout all of these constructs, silicon and its associated dielectrics (silicon dioxide, silicon nitride, etc.), can be precisely and accurately machined using the same scalable micro- and nanofabrication protocols that are ubiquitous within the semiconductor industry. These techniques lend themselves to the high throughput production of exquisitely defined and monodispersed nanoscale features that should eliminate architectural randomness as a source of experimental variation thereby potentially leading to more rapid clinical translation. The precision of silicon micro- and nanofabrication is used to create a range of innovative biomedical technologies. This review covers several of these technologies, including nanochannel implants, embedded vectors, nanowires, biocomposite porous silicon(pSi), and porous silica chips. The materials, silicon and its dielectrics, are produced using the high-throughput techniques ubiquitous within the semiconductor industry, with defined nanoscale features that could lead to rapid clinical translation.

Original languageEnglish (US)
Pages (from-to)632-666
Number of pages35
JournalAdvanced healthcare materials
Volume2
Issue number5
DOIs
StatePublished - May 1 2013
Externally publishedYes

Fingerprint

Microtechnology
Microfabrication
Silicon
Nanotechnology
Medicine
Porous silicon
Silicon Dioxide
Silica
Drug delivery
Nanowires
Bone
Throughput
Semiconductor materials
Semiconductors
Biomedical Technology
Silicon nitride
Tissue engineering
Contrast Media
Industry
Drug Implants

ASJC Scopus subject areas

  • Biomaterials
  • Biomedical Engineering
  • Pharmaceutical Science

Cite this

Fine, D., Grattoni, A., Goodall, R., Bansal, S. S., Chiappini, C., Hosali, S., ... Ferrari, M. (2013). Silicon Micro- and Nanofabrication for Medicine. Advanced healthcare materials, 2(5), 632-666. https://doi.org/10.1002/adhm.201200214

Silicon Micro- and Nanofabrication for Medicine. / Fine, Daniel; Grattoni, Alessandro; Goodall, Randy; Bansal, Shyam S.; Chiappini, Ciro; Hosali, Sharath; van de Ven, Anne L.; Srinivasan, Srimeenkashi; Liu, Xuewu; Godin, Biana; Brousseau, Louis; Yazdi, Iman K.; Fernandez-Moure, Joseph; Tasciotti, Ennio; Wu, Hung Jen; Hu, Ye; Klemm, Steve; Ferrari, Mauro.

In: Advanced healthcare materials, Vol. 2, No. 5, 01.05.2013, p. 632-666.

Research output: Contribution to journalReview article

Fine, D, Grattoni, A, Goodall, R, Bansal, SS, Chiappini, C, Hosali, S, van de Ven, AL, Srinivasan, S, Liu, X, Godin, B, Brousseau, L, Yazdi, IK, Fernandez-Moure, J, Tasciotti, E, Wu, HJ, Hu, Y, Klemm, S & Ferrari, M 2013, 'Silicon Micro- and Nanofabrication for Medicine', Advanced healthcare materials, vol. 2, no. 5, pp. 632-666. https://doi.org/10.1002/adhm.201200214
Fine D, Grattoni A, Goodall R, Bansal SS, Chiappini C, Hosali S et al. Silicon Micro- and Nanofabrication for Medicine. Advanced healthcare materials. 2013 May 1;2(5):632-666. https://doi.org/10.1002/adhm.201200214
Fine, Daniel ; Grattoni, Alessandro ; Goodall, Randy ; Bansal, Shyam S. ; Chiappini, Ciro ; Hosali, Sharath ; van de Ven, Anne L. ; Srinivasan, Srimeenkashi ; Liu, Xuewu ; Godin, Biana ; Brousseau, Louis ; Yazdi, Iman K. ; Fernandez-Moure, Joseph ; Tasciotti, Ennio ; Wu, Hung Jen ; Hu, Ye ; Klemm, Steve ; Ferrari, Mauro. / Silicon Micro- and Nanofabrication for Medicine. In: Advanced healthcare materials. 2013 ; Vol. 2, No. 5. pp. 632-666.
@article{081b8a44b552455ab6193060de7fdf49,
title = "Silicon Micro- and Nanofabrication for Medicine",
abstract = "This manuscript constitutes a review of several innovative biomedical technologies fabricated using the precision and accuracy of silicon micro- and nanofabrication. The technologies to be reviewed are subcutaneous nanochannel drug delivery implants for the continuous tunable zero-order release of therapeutics, multi-stage logic embedded vectors for the targeted systemic distribution of both therapeutic and imaging contrast agents, silicon and porous silicon nanowires for investigating cellular interactions and processes as well as for molecular and drug delivery applications, porous silicon (pSi) as inclusions into biocomposites for tissue engineering, especially as it applies to bone repair and regrowth, and porous silica chips for proteomic profiling. In the case of the biocomposites, the specifically designed pSi inclusions not only add to the structural robustness, but can also promote tissue and bone regrowth, fight infection, and reduce pain by releasing stimulating factors and other therapeutic agents stored within their porous network. The common material thread throughout all of these constructs, silicon and its associated dielectrics (silicon dioxide, silicon nitride, etc.), can be precisely and accurately machined using the same scalable micro- and nanofabrication protocols that are ubiquitous within the semiconductor industry. These techniques lend themselves to the high throughput production of exquisitely defined and monodispersed nanoscale features that should eliminate architectural randomness as a source of experimental variation thereby potentially leading to more rapid clinical translation. The precision of silicon micro- and nanofabrication is used to create a range of innovative biomedical technologies. This review covers several of these technologies, including nanochannel implants, embedded vectors, nanowires, biocomposite porous silicon(pSi), and porous silica chips. The materials, silicon and its dielectrics, are produced using the high-throughput techniques ubiquitous within the semiconductor industry, with defined nanoscale features that could lead to rapid clinical translation.",
author = "Daniel Fine and Alessandro Grattoni and Randy Goodall and Bansal, {Shyam S.} and Ciro Chiappini and Sharath Hosali and {van de Ven}, {Anne L.} and Srimeenkashi Srinivasan and Xuewu Liu and Biana Godin and Louis Brousseau and Yazdi, {Iman K.} and Joseph Fernandez-Moure and Ennio Tasciotti and Wu, {Hung Jen} and Ye Hu and Steve Klemm and Mauro Ferrari",
year = "2013",
month = "5",
day = "1",
doi = "10.1002/adhm.201200214",
language = "English (US)",
volume = "2",
pages = "632--666",
journal = "Advanced healthcare materials",
issn = "2192-2640",
publisher = "John Wiley and Sons Ltd",
number = "5",

}

TY - JOUR

T1 - Silicon Micro- and Nanofabrication for Medicine

AU - Fine, Daniel

AU - Grattoni, Alessandro

AU - Goodall, Randy

AU - Bansal, Shyam S.

AU - Chiappini, Ciro

AU - Hosali, Sharath

AU - van de Ven, Anne L.

AU - Srinivasan, Srimeenkashi

AU - Liu, Xuewu

AU - Godin, Biana

AU - Brousseau, Louis

AU - Yazdi, Iman K.

AU - Fernandez-Moure, Joseph

AU - Tasciotti, Ennio

AU - Wu, Hung Jen

AU - Hu, Ye

AU - Klemm, Steve

AU - Ferrari, Mauro

PY - 2013/5/1

Y1 - 2013/5/1

N2 - This manuscript constitutes a review of several innovative biomedical technologies fabricated using the precision and accuracy of silicon micro- and nanofabrication. The technologies to be reviewed are subcutaneous nanochannel drug delivery implants for the continuous tunable zero-order release of therapeutics, multi-stage logic embedded vectors for the targeted systemic distribution of both therapeutic and imaging contrast agents, silicon and porous silicon nanowires for investigating cellular interactions and processes as well as for molecular and drug delivery applications, porous silicon (pSi) as inclusions into biocomposites for tissue engineering, especially as it applies to bone repair and regrowth, and porous silica chips for proteomic profiling. In the case of the biocomposites, the specifically designed pSi inclusions not only add to the structural robustness, but can also promote tissue and bone regrowth, fight infection, and reduce pain by releasing stimulating factors and other therapeutic agents stored within their porous network. The common material thread throughout all of these constructs, silicon and its associated dielectrics (silicon dioxide, silicon nitride, etc.), can be precisely and accurately machined using the same scalable micro- and nanofabrication protocols that are ubiquitous within the semiconductor industry. These techniques lend themselves to the high throughput production of exquisitely defined and monodispersed nanoscale features that should eliminate architectural randomness as a source of experimental variation thereby potentially leading to more rapid clinical translation. The precision of silicon micro- and nanofabrication is used to create a range of innovative biomedical technologies. This review covers several of these technologies, including nanochannel implants, embedded vectors, nanowires, biocomposite porous silicon(pSi), and porous silica chips. The materials, silicon and its dielectrics, are produced using the high-throughput techniques ubiquitous within the semiconductor industry, with defined nanoscale features that could lead to rapid clinical translation.

AB - This manuscript constitutes a review of several innovative biomedical technologies fabricated using the precision and accuracy of silicon micro- and nanofabrication. The technologies to be reviewed are subcutaneous nanochannel drug delivery implants for the continuous tunable zero-order release of therapeutics, multi-stage logic embedded vectors for the targeted systemic distribution of both therapeutic and imaging contrast agents, silicon and porous silicon nanowires for investigating cellular interactions and processes as well as for molecular and drug delivery applications, porous silicon (pSi) as inclusions into biocomposites for tissue engineering, especially as it applies to bone repair and regrowth, and porous silica chips for proteomic profiling. In the case of the biocomposites, the specifically designed pSi inclusions not only add to the structural robustness, but can also promote tissue and bone regrowth, fight infection, and reduce pain by releasing stimulating factors and other therapeutic agents stored within their porous network. The common material thread throughout all of these constructs, silicon and its associated dielectrics (silicon dioxide, silicon nitride, etc.), can be precisely and accurately machined using the same scalable micro- and nanofabrication protocols that are ubiquitous within the semiconductor industry. These techniques lend themselves to the high throughput production of exquisitely defined and monodispersed nanoscale features that should eliminate architectural randomness as a source of experimental variation thereby potentially leading to more rapid clinical translation. The precision of silicon micro- and nanofabrication is used to create a range of innovative biomedical technologies. This review covers several of these technologies, including nanochannel implants, embedded vectors, nanowires, biocomposite porous silicon(pSi), and porous silica chips. The materials, silicon and its dielectrics, are produced using the high-throughput techniques ubiquitous within the semiconductor industry, with defined nanoscale features that could lead to rapid clinical translation.

UR - http://www.scopus.com/inward/record.url?scp=84879608077&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84879608077&partnerID=8YFLogxK

U2 - 10.1002/adhm.201200214

DO - 10.1002/adhm.201200214

M3 - Review article

C2 - 23584841

AN - SCOPUS:84879608077

VL - 2

SP - 632

EP - 666

JO - Advanced healthcare materials

JF - Advanced healthcare materials

SN - 2192-2640

IS - 5

ER -