Silicon Micro- and Nanofabrication for Medicine

Daniel Fine, Alessandro Grattoni, Randy Goodall, Shyam S. Bansal, Ciro Chiappini, Sharath Hosali, Anne L. van de Ven, Srimeenkashi Srinivasan, Xuewu Liu, Biana Godin, Louis Brousseau, Iman K. Yazdi, Joseph Fernandez-Moure, Ennio Tasciotti, Hung Jen Wu, Ye Hu, Steve Klemm, Mauro Ferrari