On increasing the accuracy of simulations of deposition and etching processes using radiosity and the level set method

Clemens Heitzinger, Siegfried Selberherr, Josef Fugger, Oliver Häberlen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Fingerprint

Dive into the research topics of 'On increasing the accuracy of simulations of deposition and etching processes using radiosity and the level set method'. Together they form a unique fingerprint.

Engineering & Materials Science