Observation of exit surface sputtering in TiO2 using biased secondary electron imaging

Peter Crozier; Martha McCartney; David Smith

doi:10.1016/0039-6028(90)90534-F

Observation of exit surface sputtering in TiO₂ using biased secondary electron imaging

Peter Crozier, Martha McCartney, David Smith

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Abstract

A dedicated ultra-high-vacuum 100 kV scanning transmission electron microscope has been used to characterize the electron-beam-induced damage which occurs on the surfaces of rutile crystals as a result of extensive electron irradiation. Biased secondary electron images from the entrance and exit surfaces indicate that the latter surface is damaged at a substantially greater rate than the former. It is concluded that knock-on collisions play an important role in the observed exit surface sputtering.

Original language	English (US)
Pages (from-to)	232-240
Number of pages	9
Journal	Surface Science
Volume	237
Issue number	1-3
DOIs	https://doi.org/10.1016/0039-6028(90)90534-F
State	Published - Nov 1 1990

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/0039-6028(90)90534-F

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@article{a9ee3edde6bb4742885493efd425ff99,

title = "Observation of exit surface sputtering in TiO2 using biased secondary electron imaging",

abstract = "A dedicated ultra-high-vacuum 100 kV scanning transmission electron microscope has been used to characterize the electron-beam-induced damage which occurs on the surfaces of rutile crystals as a result of extensive electron irradiation. Biased secondary electron images from the entrance and exit surfaces indicate that the latter surface is damaged at a substantially greater rate than the former. It is concluded that knock-on collisions play an important role in the observed exit surface sputtering.",

author = "Peter Crozier and Martha McCartney and David Smith",

note = "Funding Information: We would like to thank Dr. G.G. Hembree, Dr. P. Rez and Dr. J. Liu for useful discussions on this work and oneo f us (P.A.C.) would like to thank Dr. J.M. Cowley for financial support. This work has been supported by NSF Grants DMR-88-10238 and DMR-85-14583.",

year = "1990",

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doi = "10.1016/0039-6028(90)90534-F",

language = "English (US)",

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T1 - Observation of exit surface sputtering in TiO2 using biased secondary electron imaging

AU - Crozier, Peter

AU - McCartney, Martha

AU - Smith, David

N1 - Funding Information: We would like to thank Dr. G.G. Hembree, Dr. P. Rez and Dr. J. Liu for useful discussions on this work and oneo f us (P.A.C.) would like to thank Dr. J.M. Cowley for financial support. This work has been supported by NSF Grants DMR-88-10238 and DMR-85-14583.

PY - 1990/11/1

Y1 - 1990/11/1

N2 - A dedicated ultra-high-vacuum 100 kV scanning transmission electron microscope has been used to characterize the electron-beam-induced damage which occurs on the surfaces of rutile crystals as a result of extensive electron irradiation. Biased secondary electron images from the entrance and exit surfaces indicate that the latter surface is damaged at a substantially greater rate than the former. It is concluded that knock-on collisions play an important role in the observed exit surface sputtering.

AB - A dedicated ultra-high-vacuum 100 kV scanning transmission electron microscope has been used to characterize the electron-beam-induced damage which occurs on the surfaces of rutile crystals as a result of extensive electron irradiation. Biased secondary electron images from the entrance and exit surfaces indicate that the latter surface is damaged at a substantially greater rate than the former. It is concluded that knock-on collisions play an important role in the observed exit surface sputtering.

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DO - 10.1016/0039-6028(90)90534-F

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VL - 237

SP - 232

EP - 240

JO - Surface Science

JF - Surface Science

IS - 1-3

ER -

Observation of exit surface sputtering in TiO₂ using biased secondary electron imaging

Abstract

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