Fingerprint
Dive into the research topics of 'Molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemical-mechanical polishing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemical-mechanical polishing
Evgueni Chagarov, James Adams
Research output: Contribution to journal › Article › peer-review
28
Scopus
citations