Molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemical-mechanical polishing

Evgueni Chagarov, James Adams

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23 Scopus citations

Abstract

The molecular dynamics simulations of mechanical deformation of amorphous silicon dioxide during chemical-mechanical polishing were analyzed. The simulations clarify asperity shape evolution during the process of shear and reveal temperature distributions as a function of time. An analytic model was developed for describing the amount of material removed as a function of asperity and particle radii and relative velocity.

Original languageEnglish (US)
Pages (from-to)3853-3861
Number of pages9
JournalJournal of Applied Physics
Volume94
Issue number6
DOIs
Publication statusPublished - Sep 15 2003

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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