Microwave enhanced ion-cut silicon layer transfer

D. C. Thompson, Terry Alford, J. W. Mayer, T. Höchbauer, J. K. Lee, M. Nastasi, S. S. Lau, N. David Theodore, Paul K. Chu

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Dive into the research topics of 'Microwave enhanced ion-cut silicon layer transfer'. Together they form a unique fingerprint.

Physics & Astronomy