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Kinetic energy distribution of nitrogen ions in an electron cyclotron resonance plasma
Z. Y. Fan
, N. Newman
Research output
:
Contribution to journal
›
Article
›
peer-review
15
Scopus citations
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Dive into the research topics of 'Kinetic energy distribution of nitrogen ions in an electron cyclotron resonance plasma'. Together they form a unique fingerprint.
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Engineering & Materials Science
Electron cyclotron resonance
100%
Kinetic energy
58%
Nitrogen
51%
Plasmas
51%
Ions
51%
Ion beams
39%
Epitaxial growth
38%
Physics & Astronomy
nitrogen ions
68%
electron cyclotron resonance
60%
energy distribution
49%
kinetic energy
44%
molecular ions
30%
epitaxy
27%
ion beams
21%
requirements
18%
ions
12%
energy
8%
Chemical Compounds
Electron Cyclotron Resonance
86%
Kinetic Energy
64%
Plasma
34%
Epitaxial Growth
33%
Nitrogen
33%
Ion Beam
30%
Energy
26%
Ion
21%