Kinetic energy distribution of nitrogen ions in an electron cyclotron resonance plasma

Z. Y. Fan, Nathan Newman

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

In this article, the kinetic energy distribution of atomic and molecular nitrogen ions is reported for two electron cyclotron resonance (ECR) sources. Methods to reproducibly tune the kinetic energy of ionic species from 3 eV to 35 eV have been developed in order to produce monoenergetic ion beams for the demanding requirements of selective energy epitaxy. This article also describes methods to avoid the discontinuous hysteretic transitions between stable ECR modes. The changes in the ion energy distribution resulting from these abrupt transitions are characterized.

Original languageEnglish (US)
Pages (from-to)2132-2139
Number of pages8
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume16
Issue number4
StatePublished - Jul 1998
Externally publishedYes

Fingerprint

Electron cyclotron resonance
nitrogen ions
electron cyclotron resonance
Kinetic energy
energy distribution
Nitrogen
kinetic energy
Ions
Plasmas
Electron transitions
molecular ions
Epitaxial growth
epitaxy
Ion beams
ion beams
requirements
ions
energy

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

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