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Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators
S. Enderling, C. L. Brown, M. Balakrishnan, J. Hedley, J. T M Stevenson, S. Bond, C. C. Dunare, A. J. Harris, J. S. Burdess, M. Mitkova, Michael Kozicki, A. J. Walton
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
8
Scopus
citations