Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators

S. Enderling, C. L. Brown, M. Balakrishnan, J. Hedley, J. T M Stevenson, S. Bond, C. C. Dunare, A. J. Harris, J. S. Burdess, M. Mitkova, Michael Kozicki, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages159-162
Number of pages4
StatePublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: Jan 30 2005Feb 3 2005

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
Country/TerritoryUnited States
CityMiami Beach, FL
Period1/30/052/3/05

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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