Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators

S. Enderling, C. L. Brown, M. Balakrishnan, J. Hedley, J. T M Stevenson, S. Bond, C. C. Dunare, A. J. Harris, J. S. Burdess, M. Mitkova, Michael Kozicki, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages159-162
Number of pages4
StatePublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: Jan 30 2005Feb 3 2005

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period1/30/052/3/05

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Enderling, S., Brown, C. L., Balakrishnan, M., Hedley, J., Stevenson, J. T. M., Bond, S., Dunare, C. C., Harris, A. J., Burdess, J. S., Mitkova, M., Kozicki, M., & Walton, A. J. (2005). Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 159-162). [MP26]