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Influence of dry and wet cleaning on the properties of rapid thermal grown and deposited gate dielectrics
Xiaoli Xu, Richard T. Kuehn, Mehmet C. Öztürk, Jimmie J. Wortman, Robert J. Nemanich, Gari S. Harris, Dennis M. Maher
Research output: Contribution to journal › Article › peer-review
11
Scopus
citations