Impact of silicon nitride thickness on the infrared sensitivity of silicon nitride-aluminum microcantilevers

Matthew R. Rosenberger, Beomjin Kwon, David G. Cahill, William P. King

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Fingerprint

Dive into the research topics of 'Impact of silicon nitride thickness on the infrared sensitivity of silicon nitride-aluminum microcantilevers'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy