Impact of silicon nitride thickness on the infrared sensitivity of silicon nitride-aluminum microcantilevers

Matthew R. Rosenberger, Beomjin Kwon, David G. Cahill, William P. King

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This paper investigates how silicon nitride thickness impacts the performance of silicon nitride-aluminum bimaterial cantilever infrared sensors. A model predicts cantilever behavior by considering heat transfer within and from the cantilever, cantilever optical properties, cantilever bending mechanics, and thermomechanical noise. Silicon nitride-aluminum bimaterial cantilevers of different thicknesses were designed and fabricated. Cantilever sensitivity and noise were measured when exposed to infrared laser radiation. For cantilever thickness up to 1200 nm, thicker silicon nitride results in improved signal to noise ratio due to increased absorptivity and decreased noise. The best cantilever had an incident flux sensitivity of 2.1 × 10 -3 V W -1 m 2 and an incident flux signal to noise ratio of 406 Hz 1/2 W -1 m 2, which is more than an order of magnitude improvement compared to the best commercial cantilever.

Original languageEnglish (US)
Pages (from-to)17-23
Number of pages7
JournalSensors and Actuators, A: Physical
Volume185
DOIs
StatePublished - Oct 1 2012
Externally publishedYes

Fingerprint

Aluminum
Silicon nitride
silicon nitrides
Infrared radiation
aluminum
sensitivity
Signal to noise ratio
signal to noise ratios
Fluxes
Infrared lasers
Laser radiation
infrared lasers
absorptivity
Mechanics
Optical properties
heat transfer
laser beams
Heat transfer
optical properties
silicon nitride

Keywords

  • Bimaterial cantilever
  • Infrared sensor
  • Thermomechanical
  • Thermometer

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Impact of silicon nitride thickness on the infrared sensitivity of silicon nitride-aluminum microcantilevers. / Rosenberger, Matthew R.; Kwon, Beomjin; Cahill, David G.; King, William P.

In: Sensors and Actuators, A: Physical, Vol. 185, 01.10.2012, p. 17-23.

Research output: Contribution to journalArticle

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