Hydrogen desorption from hydrogen fluoride and remote hydrogen plasma cleaned silicon carbide (0001) surfaces

Sean W. King, Satoru Tanaka, Robert F. Davis, Robert Nemanich

Research output: Contribution to journalArticle

6 Scopus citations

Fingerprint Dive into the research topics of 'Hydrogen desorption from hydrogen fluoride and remote hydrogen plasma cleaned silicon carbide (0001) surfaces'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy