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Growth kinetics and reaction mechanism of silicon chemical vapour deposition from silane
Meng Tao
Research output
:
Contribution to journal
›
Article
›
peer-review
32
Scopus citations
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Dive into the research topics of 'Growth kinetics and reaction mechanism of silicon chemical vapour deposition from silane'. Together they form a unique fingerprint.
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Engineering & Materials Science
Growth kinetics
100%
Silanes
87%
Chemical vapor deposition
79%
Silicon
53%
Statistical Physics
34%
Single crystals
26%
Atmospheric pressure
25%
Hydrogen
18%
Gases
13%
Physics & Astronomy
silanes
74%
vapor deposition
52%
kinetics
41%
silicon
36%
atmospheric pressure
20%
low pressure
19%
collisions
14%
physics
14%
single crystals
14%
hydrogen
14%
gases
11%
Chemical Compounds
Silane
65%
Chemical Vapour Deposition
61%
Collision
22%
Polycrystalline Solid
20%
Single Crystalline Solid
16%
Amorphous Material
15%
Pressure
13%
Hydrogen
11%