Fabrication of silicon-on-SiO 2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects

Zengfeng Di, Paul K. Chu, Ming Zhu, Ricky K Y Fu, Suhua Luo, Lin Shao, M. Nastasi, Peng Chen, Terry Alford, J. W. Mayer, Miao Zhang, Weili Liu, Zhitang Song, Chenglu Lin

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Physics & Astronomy