Electrical calibration of spring-mass MEMS capacitive accelerometers

Lingfei Deng, Vinay Kundur, Naveen Sai Jangala Naga, Muhlis Kenan Ozel, Ender Yilmaz, Sule Ozev, Bertan Bakkaloglu, Sayfe Kiaei, Divya Pratab, Tehmoor Dar

Connection One (C1)
Electrical Engineering
Electrical, Computer, and Energy Engineering, School of (IAFSE-ECEE)
Adaptive Neural Systems, Center for (ANS)
Solid State Electronics Research Center (CSSER)
Knowledge Enterprise (KE)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

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Electrical calibration of spring-mass MEMS capacitive accelerometers

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Engineering & Materials Science