TY - GEN
T1 - Electrical calibration of spring-mass MEMS capacitive accelerometers
AU - Deng, Lingfei
AU - Kundur, Vinay
AU - Naga, Naveen Sai Jangala
AU - Ozel, Muhlis Kenan
AU - Yilmaz, Ender
AU - Ozev, Sule
AU - Bakkaloglu, Bertan
AU - Kiaei, Sayfe
AU - Pratab, Divya
AU - Dar, Tehmoor
PY - 2013
Y1 - 2013
N2 - Testing and calibration of MEMS devices require physical stimulus, which results in the need for specialized test equipment and thus high test cost. It has been shown for various types of sensors that electrical stimulation can be used to facilitate lower cost calibration. In this paper, we present an electrical stimulus based test and calibration technique for overdamped spring-mass capacitive accelerometers which require the characterization of stationary and dynamic calibration coefficients. We show that these two coefficients can be electrically obtained.
AB - Testing and calibration of MEMS devices require physical stimulus, which results in the need for specialized test equipment and thus high test cost. It has been shown for various types of sensors that electrical stimulation can be used to facilitate lower cost calibration. In this paper, we present an electrical stimulus based test and calibration technique for overdamped spring-mass capacitive accelerometers which require the characterization of stationary and dynamic calibration coefficients. We show that these two coefficients can be electrically obtained.
UR - http://www.scopus.com/inward/record.url?scp=84885586969&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885586969&partnerID=8YFLogxK
U2 - 10.7873/date.2013.126
DO - 10.7873/date.2013.126
M3 - Conference contribution
AN - SCOPUS:84885586969
SN - 9783981537000
T3 - Proceedings -Design, Automation and Test in Europe, DATE
SP - 571
EP - 574
BT - Proceedings - Design, Automation and Test in Europe, DATE 2013
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th Design, Automation and Test in Europe Conference and Exhibition, DATE 2013
Y2 - 18 March 2013 through 22 March 2013
ER -