Electrical calibration of spring-mass MEMS capacitive accelerometers

Lingfei Deng, Vinay Kundur, Naveen Sai Jangala Naga, Muhlis Kenan Ozel, Ender Yilmaz, Sule Ozev, Bertan Bakkaloglu, Sayfe Kiaei, Divya Pratab, Tehmoor Dar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Testing and calibration of MEMS devices require physical stimulus, which results in the need for specialized test equipment and thus high test cost. It has been shown for various types of sensors that electrical stimulation can be used to facilitate lower cost calibration. In this paper, we present an electrical stimulus based test and calibration technique for overdamped spring-mass capacitive accelerometers which require the characterization of stationary and dynamic calibration coefficients. We show that these two coefficients can be electrically obtained.

Original languageEnglish (US)
Title of host publicationProceedings - Design, Automation and Test in Europe, DATE 2013
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages571-574
Number of pages4
ISBN (Print)9783981537000
DOIs
StatePublished - Jan 1 2013
Event16th Design, Automation and Test in Europe Conference and Exhibition, DATE 2013 - Grenoble, France
Duration: Mar 18 2013Mar 22 2013

Publication series

NameProceedings -Design, Automation and Test in Europe, DATE
ISSN (Print)1530-1591

Other

Other16th Design, Automation and Test in Europe Conference and Exhibition, DATE 2013
CountryFrance
CityGrenoble
Period3/18/133/22/13

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Deng, L., Kundur, V., Naga, N. S. J., Ozel, M. K., Yilmaz, E., Ozev, S., Bakkaloglu, B., Kiaei, S., Pratab, D., & Dar, T. (2013). Electrical calibration of spring-mass MEMS capacitive accelerometers. In Proceedings - Design, Automation and Test in Europe, DATE 2013 (pp. 571-574). [6513572] (Proceedings -Design, Automation and Test in Europe, DATE). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.7873/date.2013.126