Electrical calibration of spring-mass MEMS capacitive accelerometers

Lingfei Deng, Vinay Kundur, Naveen Sai Jangala Naga, Muhlis Kenan Ozel, Ender Yilmaz, Sule Ozev, Bertan Bakkaloglu, Sayfe Kiaei, Divya Pratab, Tehmoor Dar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Testing and calibration of MEMS devices require physical stimulus, which results in the need for specialized test equipment and thus high test cost. It has been shown for various types of sensors that electrical stimulation can be used to facilitate lower cost calibration. In this paper, we present an electrical stimulus based test and calibration technique for overdamped spring-mass capacitive accelerometers which require the characterization of stationary and dynamic calibration coefficients. We show that these two coefficients can be electrically obtained.

Original languageEnglish (US)
Title of host publicationProceedings -Design, Automation and Test in Europe, DATE
Pages571-574
Number of pages4
StatePublished - 2013
Event16th Design, Automation and Test in Europe Conference and Exhibition, DATE 2013 - Grenoble, France
Duration: Mar 18 2013Mar 22 2013

Other

Other16th Design, Automation and Test in Europe Conference and Exhibition, DATE 2013
CountryFrance
CityGrenoble
Period3/18/133/22/13

Fingerprint

Accelerometers
MEMS
Calibration
Costs
Sensors
Testing

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Deng, L., Kundur, V., Naga, N. S. J., Ozel, M. K., Yilmaz, E., Ozev, S., ... Dar, T. (2013). Electrical calibration of spring-mass MEMS capacitive accelerometers. In Proceedings -Design, Automation and Test in Europe, DATE (pp. 571-574). [6513572]

Electrical calibration of spring-mass MEMS capacitive accelerometers. / Deng, Lingfei; Kundur, Vinay; Naga, Naveen Sai Jangala; Ozel, Muhlis Kenan; Yilmaz, Ender; Ozev, Sule; Bakkaloglu, Bertan; Kiaei, Sayfe; Pratab, Divya; Dar, Tehmoor.

Proceedings -Design, Automation and Test in Europe, DATE. 2013. p. 571-574 6513572.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Deng, L, Kundur, V, Naga, NSJ, Ozel, MK, Yilmaz, E, Ozev, S, Bakkaloglu, B, Kiaei, S, Pratab, D & Dar, T 2013, Electrical calibration of spring-mass MEMS capacitive accelerometers. in Proceedings -Design, Automation and Test in Europe, DATE., 6513572, pp. 571-574, 16th Design, Automation and Test in Europe Conference and Exhibition, DATE 2013, Grenoble, France, 3/18/13.
Deng L, Kundur V, Naga NSJ, Ozel MK, Yilmaz E, Ozev S et al. Electrical calibration of spring-mass MEMS capacitive accelerometers. In Proceedings -Design, Automation and Test in Europe, DATE. 2013. p. 571-574. 6513572
Deng, Lingfei ; Kundur, Vinay ; Naga, Naveen Sai Jangala ; Ozel, Muhlis Kenan ; Yilmaz, Ender ; Ozev, Sule ; Bakkaloglu, Bertan ; Kiaei, Sayfe ; Pratab, Divya ; Dar, Tehmoor. / Electrical calibration of spring-mass MEMS capacitive accelerometers. Proceedings -Design, Automation and Test in Europe, DATE. 2013. pp. 571-574
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