Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction

Peng Zhang, John Mardinly, Oleh Karpenko, Andrei Istratov, Haifeng He, Joel Ager, Chris Nelson, Eric Stach, Christian Kisielowski, Eicke Weber, John Spence

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction'. Together they form a unique fingerprint.