Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction

Peng Zhang, John Mardinly, Oleh Karpenko, Andrei Istratov, Haifeng He, Joel Ager, Chris Nelson, Eric Stach, Christian Kisielowski, Eicke Weber, John Spence

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)938-939
Number of pages2
JournalMicroscopy and Microanalysis
Volume12
Issue numberSUPPL. 2
DOIs
StatePublished - Aug 2006
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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