Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction

Peng Zhang, John Mardinly, Oleh Karpenko, Andrei Istratov, Haifeng He, Joel Ager, Chris Nelson, Eric Stach, Christian Kisielowski, Eicke Weber, John Spence

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)938-939
Number of pages2
JournalMicroscopy and Microanalysis
Volume12
Issue numberSUPPL. 2
DOIs
StatePublished - Aug 1 2006
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

Cite this

Zhang, P., Mardinly, J., Karpenko, O., Istratov, A., He, H., Ager, J., Nelson, C., Stach, E., Kisielowski, C., Weber, E., & Spence, J. (2006). Analysis of nano-scale strain near shallow trench isolation structures by energy-filtered convergent beam electron diffraction. Microscopy and Microanalysis, 12(SUPPL. 2), 938-939. https://doi.org/10.1017/S1431927606062222