Fingerprint
Dive into the research topics of 'A study of tungsten-titanium barriers in silver metallization'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
A study of tungsten-titanium barriers in silver metallization
S. Bhagat, N. D. Theodore, Terry Alford
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Scopus
citations