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Research Output 1900 2019

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Conference contribution
2000

The integration of low-k dielectric material hydrogen silsesquioxane (HSQ) with nitride thin films as barriers

Zeng, Y., Chen, L. & Alford, T., 2000, Materials Research Society Symposium - Proceedings. Oehrlein, G. S., Maex, K., Joo, Y-C., Ogawa, S. & Wetzel, J. T. (eds.). Vol. 612.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nitrides
Hydrogen
Physical vapor deposition
Thin films
Chemical vapor deposition
1997

Analysis of residual stress in polycrystalline silver thin films by x-ray diffraction

Alford, T., Zeng, Y., Zou, Y. L., Deng, F., Lau, S. S., Laursen, T. & Ullrich, B. M., 1997, Materials Research Society Symposium - Proceedings. MRS, Vol. 472. p. 293-298 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silver
Residual stresses
Diffraction
X rays
Thin films

Influence of underlayer and encapsulation process on texture in polycrystalline silver thin films

Zeng, Y., Zou, Y. L., Alford, T., Deng, F., Lau, S. S., Laursen, T. & Ullrich, B. M., 1997, Materials Research Society Symposium - Proceedings. MRS, Vol. 472. p. 203-208 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Encapsulation
Silver
Textures
Thin films
Fibers
1 Citation (Scopus)

Physical characterization of photosensitive polyimide

Zou, Y. L., Alford, T. & Mayer, J. W., 1997, Materials Research Society Symposium - Proceedings. MRS, Vol. 476. p. 255-260 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polyimides
Polymers
Anisotropy
Wavelength
Diamines

TEM observations of Ag-Ti bilayers after thermal aging treatment in a reducing ambient

Amali, A. I., Mayer, J. W., Zeng, Y., Zou, Y. L., Alford, T., Deng, F. & Lau, S. S., 1997, Materials Research Society Symposium - Proceedings. MRS, Vol. 472. p. 197-202 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Thermal aging
Transmission electron microscopy
Textures
Annealing
Bamboo
1996
1 Citation (Scopus)

Cobalt and titanium metallization of SiGeC for shallow contacts

Bair, A. E., Alford, T., Atzmon, Z., Marcus, S. D., Doller, D. C., Morton, R., Lau, S. S. & Mayer, J. W., 1996, Materials Research Society Symposium - Proceedings. Coffa, S., Polman, A. & Schwartz, R. N. (eds.). Materials Research Society, Vol. 427. p. 529-533 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cobalt
Metallizing
Titanium
Diffraction
Annealing
6 Citations (Scopus)

Encapsulation of silver via nitridation of Ag/Ti bilayer structures

Zou, Y. L., Alford, T., Adams, D., Laursen, T., Tu, K. N., Morton, R. & Lau, S. S., 1996, Materials Research Society Symposium - Proceedings. Coffa, S., Polman, A. & Schwartz, R. N. (eds.). Materials Research Society, Vol. 427. p. 355-360 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nitridation
Encapsulation
Silver
X ray analysis
Rutherford backscattering spectroscopy

Formation of TiN-encapsulated silver films by nitridation of silver-refractory metal alloys in NH 3

Adams, D., Alford, T., Laursen, T., Deng, F., Morton, R. & Lau, S. S., 1996, Materials Research Society Symposium - Proceedings. Coffa, S., Polman, A. & Schwartz, R. N. (eds.). Materials Research Society, Vol. 427. p. 337-342 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Refractory metals
Nitridation
Silver
Silicon
Annealing

Heteroepitaxial Si 1-x-yGe xC y layer growth on (100)Si by atmospheric pressure chemical vapor deposition

Atzmon, Z., Bair, A. E., Alford, T., Chandrasekhar, D., Smith, D. & Mayer, J. W., 1996, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 399. p. 117-122 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Atmospheric pressure
Chemical vapor deposition
Rutherford backscattering spectroscopy
Secondary ion mass spectrometry
Dislocations (crystals)

Influence of interfacial copper on the Ti-SiO 2 reaction during nitridation of Cu-Ti films

Adams, D., Alford, T., Theodore, N. D., Laursen, T., Russell, S. W. & Kim, M. J., 1996, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 398. p. 631-636 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nitridation
Copper
Oxides
Annealing
X rays
1 Citation (Scopus)

Low temperature oxidation of silicon after copper ion implantation

Jaquez, E. J., Alford, T., Theodore, N. D., Adams, D., Li, J., Russell, S. W. & Anders, S., 1996, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 398. p. 189-193 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silicon oxides
Silicon
Ion implantation
Oxides
Copper

Passivation of Ag on SiO2by annealing Ag-Ti alloys in an ammonia ambient

Adams, D., Alford, T., Laursen, T., Mayer, J. W. & Zou, L., 1996, European Solid-State Device Research Conference. IEEE Computer Society, p. 31-38 8 p. 5436210

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Passivation
Ammonia
Annealing
Temperature
Nitridation

Wet oxidation of Si 1-x-yGe xC y layers on (100) Si

Bair, A. E., Atzmon, Z., Alford, T., Chandrasekhar, D. & Smith, D., 1996, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 398. p. 625-630 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Oxidation
Oxides
Rutherford backscattering spectroscopy
Crystallization
Nanocrystals

X-ray diffraction analysis of the strain of SiGeC/(100)Si alloys

Bair, A. E., Alford, T., Sego, S., Atzmon, Z. & Culbertson, R., 1996, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 399. p. 461-466 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

X ray diffraction analysis
Chemical analysis
Strain measurement
Diffractometers
Ions
1995

Ion beam mixing of titanium overlayers with hydroxyapatite substrates

Levine, T. E., Nastasi, M., Alford, T., Suchicital, C., Russell, S., Luptak, K., Pizziconi, V. & Mayer, J. W., 1995, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 356. p. 791-796 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Durapatite
Titanium
Hydroxyapatite
Ion beams
Ion bombardment

Ion mixing of pulsed laser deposited hydroxylapatite (HA)

Alford, T., Russell, S. W., Pizziconi, V., Mayer, J. W., Levine, T. E., Nastasi, M., Cotell, C. M. & Auyeung, R. C. Y., 1995, Materials Research Society Symposium - Proceedings. Jacobson, D. C., Luzzi, D. E., Heinz, T. F. & Iwaki, M. (eds.). Materials Research Society, Vol. 354. p. 15-20 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Durapatite
Pulsed lasers
Ions
Ion bombardment
Titanium
1994
7 Citations (Scopus)

Effectiveness of nitride diffusion barriers in a self-encapsulated copper-based metallization

Adams, D., Spreitzer, R. L., Russell, S. W., Theodore, N. D., Alford, T. & Mayer, J. W., 1994, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 337. p. 231-236 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diffusion barriers
Metallizing
Nitrides
Copper
Nitridation
6 Citations (Scopus)

Enhanced adhesion of copper films to SiO 2, PSG and BPSG by refractory metal additions

Rafalski, S. A., Spreitzer, R. L., Russell, S. W., Alford, T., Li, J., Moinpour, M., Moghadam, F. & Mayer, J. W., 1994, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 337. p. 613-618 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Refractory metals
Copper
Adhesion
Rutherford backscattering spectroscopy
Surface chemistry
2 Citations (Scopus)

Interfacial reactions of copper/refractory alloy and bilayer films on SiO 2

Spreitzer, R. L., Rafalski, S. A., Adams, D., Russell, S. W., Atzmon, Z., Li, J., Alford, T. & Mayer, J. W., 1994, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 337. p. 631-636 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Refractory alloys
Refractory metals
Copper alloys
Surface chemistry
Depth profiling
2 Citations (Scopus)

Investigation of chromium nitridation using ion beam resonance analysis

Russell, S. W., Bair, A. E., Rack, M. J., Adams, D., Spreitzer, R. L., Alford, T. & Culbertson, R., 1994, Materials Research Society Symposium - Proceedings. Materials Research Society, Vol. 337. p. 619-624 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nitridation
Chromium
Ion beams
Calibration
Rutherford backscattering spectroscopy
1985

MICROSTRUCTURE OF IMPLANTED AND RAPID THERMAL ANNEALED SIPOS.

Yang, D. K., Alford, T., Maszara, W., Ozguz, V. H., Wortman, J. T. & Rozgonyi, G. A., 1985, Electrochemical Society Extended Abstracts. Electrochemical Soc, Vol. 85-1. p. 374-375 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polysilicon
Microstructure
Passivation
Resistors
Chemical vapor deposition