The sue of the Boltzmann transport equation to describe electron scattering in scanning electron microscopy and electron probe microanalysis is reviewed. A quantitative theory is described in which the transport equation is divided into angle and energy ranges, and solutions are derived in terms of a first-order coupled differential equation. This method is related to other transport equation methods. A simplified form of the theory in which inelastic scattering gives rise only to absorption is also given. Calculations using this method are fast and accurate. The validity of the simplified theory which accounts well for variations with angle is discussed, and it would appear that details of the inelastic scattering are not important in describing the gross features of electron backscattering.
ASJC Scopus subject areas
- Control and Systems Engineering