### Abstract

The sue of the Boltzmann transport equation to describe electron scattering in scanning electron microscopy and electron probe microanalysis is reviewed. A quantitative theory is described in which the transport equation is divided into angle and energy ranges, and solutions are derived in terms of a first-order coupled differential equation. This method is related to other transport equation methods. A simplified form of the theory in which inelastic scattering gives rise only to absorption is also given. Calculations using this method are fast and accurate. The validity of the simplified theory which accounts well for variations with angle is discussed, and it would appear that details of the inelastic scattering are not important in describing the gross features of electron backscattering.

Original language | English (US) |
---|---|

Pages (from-to) | 55-66 |

Number of pages | 12 |

Journal | Scanning Electron Microscopy |

Issue number | pt 1 |

State | Published - 1979 |

Externally published | Yes |

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### ASJC Scopus subject areas

- Biophysics
- Control and Systems Engineering

### Cite this

*Scanning Electron Microscopy*, (pt 1), 55-66.

**TRANSPORT EQUATION THEORY OF ELECTRON BACKSCATTERING.** / Fathers, D. J.; Rez, Peter.

Research output: Contribution to journal › Article

*Scanning Electron Microscopy*, no. pt 1, pp. 55-66.

}

TY - JOUR

T1 - TRANSPORT EQUATION THEORY OF ELECTRON BACKSCATTERING.

AU - Fathers, D. J.

AU - Rez, Peter

PY - 1979

Y1 - 1979

N2 - The sue of the Boltzmann transport equation to describe electron scattering in scanning electron microscopy and electron probe microanalysis is reviewed. A quantitative theory is described in which the transport equation is divided into angle and energy ranges, and solutions are derived in terms of a first-order coupled differential equation. This method is related to other transport equation methods. A simplified form of the theory in which inelastic scattering gives rise only to absorption is also given. Calculations using this method are fast and accurate. The validity of the simplified theory which accounts well for variations with angle is discussed, and it would appear that details of the inelastic scattering are not important in describing the gross features of electron backscattering.

AB - The sue of the Boltzmann transport equation to describe electron scattering in scanning electron microscopy and electron probe microanalysis is reviewed. A quantitative theory is described in which the transport equation is divided into angle and energy ranges, and solutions are derived in terms of a first-order coupled differential equation. This method is related to other transport equation methods. A simplified form of the theory in which inelastic scattering gives rise only to absorption is also given. Calculations using this method are fast and accurate. The validity of the simplified theory which accounts well for variations with angle is discussed, and it would appear that details of the inelastic scattering are not important in describing the gross features of electron backscattering.

UR - http://www.scopus.com/inward/record.url?scp=0018723705&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0018723705&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0018723705

SP - 55

EP - 66

JO - Scanning Electron Microscopy

JF - Scanning Electron Microscopy

SN - 0586-5581

IS - pt 1

ER -