The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell

B. R. Takulapalli; Trevor Thornton; D. Gust; B. Ashcroft; Stuart Lindsay; H. Q. Zhang; Nongjian Tao

The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell

B. R. Takulapalli, Trevor Thornton, D. Gust, B. Ashcroft, Stuart Lindsay, H. Q. Zhang, Nongjian Tao

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The pH response of a silicon-on-insulator (SOI) MOSFET with an integrated nanofluidic cell was studied. The surface of the MOSFET was functionalized with amino-propyl-triethoxysilane (APTES) molecules resulting in an amine terminated substrate. A 75 μm thick SU-8 photoresist was spin coated and patterned over the device surface in order to make a cell to contain the solutions.

Original language	English (US)
Title of host publication	IEEE International SOI Conference
Pages	114-116
Number of pages	3
State	Published - 2003
Event	2003 IEEE International SOI Conference Proceedings - Newport Beach, CA, United States Duration: Sep 29 2003 → Oct 2 2003

Other

Other	2003 IEEE International SOI Conference Proceedings
Country/Territory	United States
City	Newport Beach, CA
Period	9/29/03 → 10/2/03

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

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title = "The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell",

abstract = "The pH response of a silicon-on-insulator (SOI) MOSFET with an integrated nanofluidic cell was studied. The surface of the MOSFET was functionalized with amino-propyl-triethoxysilane (APTES) molecules resulting in an amine terminated substrate. A 75 μm thick SU-8 photoresist was spin coated and patterned over the device surface in order to make a cell to contain the solutions.",

author = "Takulapalli, {B. R.} and Trevor Thornton and D. Gust and B. Ashcroft and Stuart Lindsay and Zhang, {H. Q.} and Nongjian Tao",

year = "2003",

language = "English (US)",

pages = "114--116",

booktitle = "IEEE International SOI Conference",

note = "2003 IEEE International SOI Conference Proceedings ; Conference date: 29-09-2003 Through 02-10-2003",

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T1 - The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell

AU - Takulapalli, B. R.

AU - Thornton, Trevor

AU - Gust, D.

AU - Ashcroft, B.

AU - Lindsay, Stuart

AU - Zhang, H. Q.

AU - Tao, Nongjian

PY - 2003

Y1 - 2003

N2 - The pH response of a silicon-on-insulator (SOI) MOSFET with an integrated nanofluidic cell was studied. The surface of the MOSFET was functionalized with amino-propyl-triethoxysilane (APTES) molecules resulting in an amine terminated substrate. A 75 μm thick SU-8 photoresist was spin coated and patterned over the device surface in order to make a cell to contain the solutions.

AB - The pH response of a silicon-on-insulator (SOI) MOSFET with an integrated nanofluidic cell was studied. The surface of the MOSFET was functionalized with amino-propyl-triethoxysilane (APTES) molecules resulting in an amine terminated substrate. A 75 μm thick SU-8 photoresist was spin coated and patterned over the device surface in order to make a cell to contain the solutions.

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M3 - Conference contribution

AN - SCOPUS:0142185865

SP - 114

EP - 116

BT - IEEE International SOI Conference

T2 - 2003 IEEE International SOI Conference Proceedings

Y2 - 29 September 2003 through 2 October 2003

ER -

The pH Response of a Silicon-on-Insulator MOSFET with an Integrated Nanofluidic Cell

Abstract

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ASJC Scopus subject areas

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