The fabrication of 3D aspherical silicon microlenses using a shadow mask

J. Zhu, S. J. Chen, C. Y. Lin, J. Oiler, H. Wang, Y. C. Chen, H. Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages2370-2373
Number of pages4
DOIs
StatePublished - Sep 1 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Keywords

  • Acoustic transducer
  • Infrared optics
  • Microlens
  • Shadow mask

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Zhu, J., Chen, S. J., Lin, C. Y., Oiler, J., Wang, H., Chen, Y. C., & Yu, H. (2011). The fabrication of 3D aspherical silicon microlenses using a shadow mask. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2370-2373). [5969562] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969562