The fabrication of 3D aspherical silicon microlenses using a shadow mask

J. Zhu, S. J. Chen, C. Y. Lin, J. Oiler, H. Wang, Y. C. Chen, H. Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages2370-2373
Number of pages4
DOIs
StatePublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Fingerprint

Microlenses
Masks
Acoustic transducers
Fabrication
Silicon
Lenses
Optics
Anisotropy
Infrared radiation
Costs

Keywords

  • Acoustic transducer
  • Infrared optics
  • Microlens
  • Shadow mask

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Zhu, J., Chen, S. J., Lin, C. Y., Oiler, J., Wang, H., Chen, Y. C., & Yu, H. (2011). The fabrication of 3D aspherical silicon microlenses using a shadow mask. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2370-2373). [5969562] https://doi.org/10.1109/TRANSDUCERS.2011.5969562

The fabrication of 3D aspherical silicon microlenses using a shadow mask. / Zhu, J.; Chen, S. J.; Lin, C. Y.; Oiler, J.; Wang, H.; Chen, Y. C.; Yu, H.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2370-2373 5969562.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhu, J, Chen, SJ, Lin, CY, Oiler, J, Wang, H, Chen, YC & Yu, H 2011, The fabrication of 3D aspherical silicon microlenses using a shadow mask. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969562, pp. 2370-2373, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969562
Zhu J, Chen SJ, Lin CY, Oiler J, Wang H, Chen YC et al. The fabrication of 3D aspherical silicon microlenses using a shadow mask. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2370-2373. 5969562 https://doi.org/10.1109/TRANSDUCERS.2011.5969562
Zhu, J. ; Chen, S. J. ; Lin, C. Y. ; Oiler, J. ; Wang, H. ; Chen, Y. C. ; Yu, H. / The fabrication of 3D aspherical silicon microlenses using a shadow mask. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 2370-2373
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