Temperature control of diffusion/CVD furnaces using robust multivariable loop-shaping techniques

Konstantinos Tsakalis, Jose Job Flores-Godoy, Kevin Stoddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

This paper describes the application of modern tools from robust control theory to the design of high-performance multivariable temperature controllers for diffusion furnaces. The process is modeled from input-output data, collected in a identification experiment at the desired operating conditions. An important component of the identification is the computation of uncertainty bounds describing the confidence limits of the model, in a manner consistent with robust control theory. The identification results are then used to design an H-infinity controller with a cascade, hierarchical structure. The gain-scheduling of several linear controllers is also investigated in an effort to achieve good performance in a wide range of operating conditions. Experimental results demonstrate the success of the approach.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Conference on Decision and Control
PublisherIEEE
Pages4192-4197
Number of pages6
Volume4
StatePublished - 1999
EventThe 38th IEEE Conference on Decision and Control (CDC) - Phoenix, AZ, USA
Duration: Dec 7 1999Dec 10 1999

Other

OtherThe 38th IEEE Conference on Decision and Control (CDC)
CityPhoenix, AZ, USA
Period12/7/9912/10/99

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ASJC Scopus subject areas

  • Chemical Health and Safety
  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality

Cite this

Tsakalis, K., Flores-Godoy, J. J., & Stoddard, K. (1999). Temperature control of diffusion/CVD furnaces using robust multivariable loop-shaping techniques. In Proceedings of the IEEE Conference on Decision and Control (Vol. 4, pp. 4192-4197). IEEE.