Synthesis of Aminosilane Chemical Vapor Deposition Precursors and Polycarbosilazanes through Manganese-Catalyzed Si-N Dehydrocoupling
Thao T. Nguyen, Tufan K. Mukhopadhyay, Samantha N. Macmillan, Michael T. Janicke, Ryan J. Trovitch
Research output: Contribution to journal › Article › peer-review
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