Synthesis and optical properties of amorphous Si₃N _{4- x}P_x dielectrics and complementary insights from ab initio structural simulations

Chemical Compounds

• Nitride 77%
• Dielectric Material 70%
• Band Gap 60%
• Optical Property 58%
• Amorphous Material 55%
• Simulation 50%
• Nonstoichiometric Compound 44%
• Molecular Geometry 44%
• Ellipsometry 44%
• Electronic Band Structure 40%
• Tetrahedral Crystal 38%
• Refractive Index 38%
• Ground State 31%
• Ammonia 30%
• Alloy 28%
• Density Functional Theory 25%
• Mixture 17%
• Reaction Yield 16%
• Application 12%

Engineering & Materials Science

• Optical properties 100%
• Optical band gaps 53%
• Spectroscopic ellipsometry 48%
• Tuning 41%
• Ground state 40%
• Density functional theory 40%
• Band structure 37%
• Refractive index 35%
• Geometry 32%
• Silicon nitride 32%
• Nitrides 32%
• Chemical vapor deposition 31%
• Ammonia 28%
• Fluxes 21%
• Silicon 21%
• Chemical analysis 17%
• Air 14%