Swift heavy ion-induced silicon dioxide nanostructuration: Experimental observation of velocity effect

A. D. Touboul; A. Privat; R. Arinero; F. Wrobel; E. Lorfèvre; F. Saigné

doi:10.1051/epjap/2012120349

Swift heavy ion-induced silicon dioxide nanostructuration: Experimental observation of velocity effect

A. D. Touboul, A. Privat, R. Arinero, F. Wrobel, E. Lorfèvre, F. Saigné

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Thanks to atomic force microscope observation of swift heavy ion-induced structural modifications of SiO₂-Si layer, we show that for a given linear energy transfer value the radial atomic modification along the ion track depends on the ion velocity regime.

Original language	English (US)
Article number	10402
Journal	EPJ Applied Physics
Volume	60
Issue number	1
DOIs	https://doi.org/10.1051/epjap/2012120349
State	Published - 2012
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics

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title = "Swift heavy ion-induced silicon dioxide nanostructuration: Experimental observation of velocity effect",

abstract = "Thanks to atomic force microscope observation of swift heavy ion-induced structural modifications of SiO2-Si layer, we show that for a given linear energy transfer value the radial atomic modification along the ion track depends on the ion velocity regime.",

author = "Touboul, {A. D.} and A. Privat and R. Arinero and F. Wrobel and E. Lorf{\`e}vre and F. Saign{\'e}",

year = "2012",

doi = "10.1051/epjap/2012120349",

language = "English (US)",

volume = "60",

journal = "EPJ Applied Physics",

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T2 - Experimental observation of velocity effect

AU - Touboul, A. D.

AU - Privat, A.

AU - Arinero, R.

AU - Wrobel, F.

AU - Lorfèvre, E.

AU - Saigné, F.

PY - 2012

Y1 - 2012

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AB - Thanks to atomic force microscope observation of swift heavy ion-induced structural modifications of SiO2-Si layer, we show that for a given linear energy transfer value the radial atomic modification along the ion track depends on the ion velocity regime.

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UR - http://www.scopus.com/inward/citedby.url?scp=84873336043&partnerID=8YFLogxK

U2 - 10.1051/epjap/2012120349

DO - 10.1051/epjap/2012120349

M3 - Article

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SN - 1286-0042

VL - 60

JO - EPJ Applied Physics

JF - EPJ Applied Physics

IS - 1

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ER -

Swift heavy ion-induced silicon dioxide nanostructuration: Experimental observation of velocity effect

Abstract

ASJC Scopus subject areas

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