Swift heavy ion-induced silicon dioxide nanostructuration: Experimental observation of velocity effect

A. D. Touboul, A. Privat, R. Arinero, F. Wrobel, E. Lorfèvre, F. Saigné

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Thanks to atomic force microscope observation of swift heavy ion-induced structural modifications of SiO2-Si layer, we show that for a given linear energy transfer value the radial atomic modification along the ion track depends on the ion velocity regime.

Original languageEnglish (US)
Article number10402
JournalEPJ Applied Physics
Volume60
Issue number1
DOIs
StatePublished - 2012
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics

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