Surface topography of laser annealed silicon

D. Haneman; R. J. Nemanich

doi:10.1016/0038-1098(82)90111-9

Surface topography of laser annealed silicon

D. Haneman, R. J. Nemanich

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

The topography of silicon has been studied by Nomarski and scanning electron microscopy and by light diffraction techniques. In addition to the previously known ripple structure with wavelength perpendicular to the laser E vector, two new ripple structures of other orientations have been found. The heights of the structures have been determined for the first time.

Original language	English (US)
Pages (from-to)	203-206
Number of pages	4
Journal	Solid State Communications
Volume	43
Issue number	3
DOIs	https://doi.org/10.1016/0038-1098(82)90111-9
State	Published - Jul 1982
Externally published	Yes

ASJC Scopus subject areas

General Chemistry
Condensed Matter Physics
Materials Chemistry

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10.1016/0038-1098(82)90111-9

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title = "Surface topography of laser annealed silicon",

abstract = "The topography of silicon has been studied by Nomarski and scanning electron microscopy and by light diffraction techniques. In addition to the previously known ripple structure with wavelength perpendicular to the laser E vector, two new ripple structures of other orientations have been found. The heights of the structures have been determined for the first time.",

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year = "1982",

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doi = "10.1016/0038-1098(82)90111-9",

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pages = "203--206",

journal = "Solid State Communications",

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AU - Haneman, D.

AU - Nemanich, R. J.

PY - 1982/7

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N2 - The topography of silicon has been studied by Nomarski and scanning electron microscopy and by light diffraction techniques. In addition to the previously known ripple structure with wavelength perpendicular to the laser E vector, two new ripple structures of other orientations have been found. The heights of the structures have been determined for the first time.

AB - The topography of silicon has been studied by Nomarski and scanning electron microscopy and by light diffraction techniques. In addition to the previously known ripple structure with wavelength perpendicular to the laser E vector, two new ripple structures of other orientations have been found. The heights of the structures have been determined for the first time.

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JO - Solid State Communications

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Surface topography of laser annealed silicon

Abstract

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