Surface topography of laser annealed silicon

D. Haneman, R. J. Nemanich

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

The topography of silicon has been studied by Nomarski and scanning electron microscopy and by light diffraction techniques. In addition to the previously known ripple structure with wavelength perpendicular to the laser E vector, two new ripple structures of other orientations have been found. The heights of the structures have been determined for the first time.

Original languageEnglish (US)
Pages (from-to)203-206
Number of pages4
JournalSolid State Communications
Volume43
Issue number3
DOIs
StatePublished - Jul 1982
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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