Abstract
A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.
Original language | English (US) |
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Pages (from-to) | 29-36 |
Number of pages | 8 |
Journal | Journal of Microelectromechanical Systems |
Volume | 14 |
Issue number | 1 |
DOIs | |
State | Published - Feb 2005 |
Keywords
- Curvature modulation
- Microelectromechanical systems (MEMS)
- Micromirror
- Multilayer
- Optical switch
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering