Static and electrically actuated shaped MEMS mirrors

Bin Mi, David A. Smith, Harold Kahn, Frank L. Merat, Arthur H. Heuer, Stephen Phillips

Research output: Contribution to journalArticle

16 Scopus citations

Abstract

A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.

Original languageEnglish (US)
Pages (from-to)29-36
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume14
Issue number1
DOIs
StatePublished - Feb 1 2005

Keywords

  • Curvature modulation
  • Microelectromechanical systems (MEMS)
  • Micromirror
  • Multilayer
  • Optical switch

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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