Static and electrically actuated shaped MEMS mirrors

Bin Mi, David A. Smith, Harold Kahn, Frank L. Merat, Arthur H. Heuer, Stephen Phillips

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.

Original languageEnglish (US)
Pages (from-to)29-36
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume14
Issue number1
DOIs
StatePublished - Feb 2005

Fingerprint

MEMS
Mirrors
Surface micromachining
Optical switches
Polysilicon
Interferometers
Multilayers
Electric potential

Keywords

  • Curvature modulation
  • Microelectromechanical systems (MEMS)
  • Micromirror
  • Multilayer
  • Optical switch

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Static and electrically actuated shaped MEMS mirrors. / Mi, Bin; Smith, David A.; Kahn, Harold; Merat, Frank L.; Heuer, Arthur H.; Phillips, Stephen.

In: Journal of Microelectromechanical Systems, Vol. 14, No. 1, 02.2005, p. 29-36.

Research output: Contribution to journalArticle

Mi, Bin ; Smith, David A. ; Kahn, Harold ; Merat, Frank L. ; Heuer, Arthur H. ; Phillips, Stephen. / Static and electrically actuated shaped MEMS mirrors. In: Journal of Microelectromechanical Systems. 2005 ; Vol. 14, No. 1. pp. 29-36.
@article{d8dd178bad5747d29b44eed960fd3b9e,
title = "Static and electrically actuated shaped MEMS mirrors",
abstract = "A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.",
keywords = "Curvature modulation, Microelectromechanical systems (MEMS), Micromirror, Multilayer, Optical switch",
author = "Bin Mi and Smith, {David A.} and Harold Kahn and Merat, {Frank L.} and Heuer, {Arthur H.} and Stephen Phillips",
year = "2005",
month = "2",
doi = "10.1109/JMEMS.2004.839022",
language = "English (US)",
volume = "14",
pages = "29--36",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "1",

}

TY - JOUR

T1 - Static and electrically actuated shaped MEMS mirrors

AU - Mi, Bin

AU - Smith, David A.

AU - Kahn, Harold

AU - Merat, Frank L.

AU - Heuer, Arthur H.

AU - Phillips, Stephen

PY - 2005/2

Y1 - 2005/2

N2 - A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.

AB - A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.

KW - Curvature modulation

KW - Microelectromechanical systems (MEMS)

KW - Micromirror

KW - Multilayer

KW - Optical switch

UR - http://www.scopus.com/inward/record.url?scp=14044257169&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=14044257169&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2004.839022

DO - 10.1109/JMEMS.2004.839022

M3 - Article

AN - SCOPUS:14044257169

VL - 14

SP - 29

EP - 36

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 1

ER -