Abstract

We report on the higherature characteristics and stability of both alloyed Ti/Al/Ni/Au ohmic contacts and nonalloyed Al/Au ohmic contacts to n-type GaN at temperatures up to 600 °C in air. The alloyed contacts showed a specific contact resistivity (ρc) of 6.8 - 10-6 Ω cm2 at room temperature after fabrication. ρc did not change with temperature or show degradation after the application of thermal stress at 600 °C for 4 h in air. The ρc of nonalloyed contacts was reduced by two orders of magnitude and stabilized to 5 - 10-6 Ω cm2 after the application of higherature thermal stress. Transmission electron microscopy, scanning transmission electron microscopy, and electron energy loss spectroscopy were used to analyze the metal-semiconductor interface to understand the formation of the low-resistivity and high-stability ohmic contacts at high temperature. Our study reveals the high stability of both alloyed and nonalloyed ohmic contacts for GaN-based electronic devices operating at high temperatures in air.

Original languageEnglish (US)
Article number126502
JournalJapanese Journal of Applied Physics
Volume56
Issue number12
DOIs
StatePublished - Dec 1 2017

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Ohmic contacts
electric contacts
air
Air
thermal stresses
Thermal stress
Temperature
Transmission electron microscopy
transmission electron microscopy
electrical resistivity
Electron energy loss spectroscopy
energy dissipation
electron energy
Semiconductor materials
degradation
Fabrication
Degradation
Scanning electron microscopy
fabrication
scanning electron microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Stability of alloyed and nonalloyed ohmic contacts to n-type GaN at high temperature in air. / Zhao, Shirong; Gao, Jianyi; Wang, Shuo; Xie, Hongen; Ponce, Fernando; Goodnick, Stephen; Chowdhury, Srabanti.

In: Japanese Journal of Applied Physics, Vol. 56, No. 12, 126502, 01.12.2017.

Research output: Contribution to journalArticle

Zhao, Shirong ; Gao, Jianyi ; Wang, Shuo ; Xie, Hongen ; Ponce, Fernando ; Goodnick, Stephen ; Chowdhury, Srabanti. / Stability of alloyed and nonalloyed ohmic contacts to n-type GaN at high temperature in air. In: Japanese Journal of Applied Physics. 2017 ; Vol. 56, No. 12.
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