The slip systems in the wurtzite structure and the role of threading dislocations in strain relaxation in InGaN alloys were analyzed. The microstructure of InGaN epilayers grown on two GaN layers having different dislocation densities was studied. The InGaN layers were grown by metallorganic chemical vapor deposition (MOCVD) under standard conditions, to a thickness of ∼100 nm, using two types of underlying GaN layers on c-plane sapphire. The spatial variation of light emission was probed by cathodoluminescence(CL) imaging in a scanning electron microscope with a commercial spectrometer.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)