Si/SiGe quantum wells grown on vicinal Si(001) substrates: Morphology, dislocation dynamics, and transport properties

P. Waltereit, J. M. Fernández, S. Kaya, Trevor Thornton

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Compositionally graded, strain relaxed Si0.72Ge0.28 buffers were grown on vicinal Si(001) substrates by gas source molecular beam epitaxy. Misfit dislocations are shown to run along intersections of the 111 glide planes with the (11n) interface. X-ray diffraction studies demonstrate a relative tilt of the epilayer to the substrate in a direction which depends on the interplay between substrate orientation related preferential dislocation nucleation rates and surface contamination induced heterogeneous nucleation. Atomic force microscopy (AFM) images reveal an anisotropy in surface roughness on the μm scale related to reduced growth rates on vicinal surfaces. Transport properties at 0.4 K in two dimensional electron gases grown on these relaxed SiGe buffers show anisotropic scattering times similar to interface roughness scattering which can be correlated to terrace configurations in the nm range determined by AFM.

Original languageEnglish (US)
Pages (from-to)2262-2264
Number of pages3
JournalApplied Physics Letters
Volume72
Issue number18
DOIs
StatePublished - 1998
Externally publishedYes

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dynamic characteristics
transport properties
quantum wells
buffers
atomic force microscopy
nucleation
scattering
intersections
electron gas
surface roughness
contamination
molecular beam epitaxy
roughness
anisotropy
configurations
diffraction
gases
x rays

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Si/SiGe quantum wells grown on vicinal Si(001) substrates : Morphology, dislocation dynamics, and transport properties. / Waltereit, P.; Fernández, J. M.; Kaya, S.; Thornton, Trevor.

In: Applied Physics Letters, Vol. 72, No. 18, 1998, p. 2262-2264.

Research output: Contribution to journalArticle

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