Simple adaptive controller for an oxidation process

Konstantinos Tsakalis, Peter E. Crouch

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this note we discuss the application of adaptive controller design techniques in a manufacturing process. As an example, we consider the process of oxidation of silicon in dry oxygen. This process consists of a single batch step where silicon wafers are introduced in a chamber and are oxidized for a time period at high temperature. Our objective is to determine the oxidation time such that a prescribed oxide thickness is grown on the silicon.

Original languageEnglish (US)
Title of host publicationProceedings of the American Control Conference
PublisherPubl by American Automatic Control Council
Pages1023-1027
Number of pages5
ISBN (Print)0780302109
StatePublished - Dec 1 1992
EventProceedings of the 1992 American Control Conference - Chicago, IL, USA
Duration: Jun 24 1992Jun 26 1992

Publication series

NameProceedings of the American Control Conference
Volume2
ISSN (Print)0743-1619

Other

OtherProceedings of the 1992 American Control Conference
CityChicago, IL, USA
Period6/24/926/26/92

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Tsakalis, K., & Crouch, P. E. (1992). Simple adaptive controller for an oxidation process. In Proceedings of the American Control Conference (pp. 1023-1027). (Proceedings of the American Control Conference; Vol. 2). Publ by American Automatic Control Council.