Room temperature ozone detection using ZnO based film bulk acoustic resonator (FBAR)

Z. Wang, X. Qiu, J. Shi, H. Yu

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

This study describes room temperature ozone sensing with a ZnO based film bulk acoustic resonator (FBAR). The resonant frequency of FBAR decreased upon ozone exposure. For 1400 ppb ozone, the frequency downshift was 131 kHz with a response time of 12 s. The frequency decrease of the FBAR sensor was proposed to be due to the density increase of the ZnO film. Ozone can be adsorbed on the ZnO surface by capturing free electrons from the film, which increases the film density. An analytical model was developed to predict the relationship between resonant frequency and ozone concentration. In agreement with the experiment, a hyperbolic function was obtained.

Original languageEnglish (US)
Pages (from-to)J13-J16
JournalJournal of the Electrochemical Society
Volume159
Issue number1
DOIs
StatePublished - Feb 29 2012

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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