Abstract
The development of low voltage scanning electron microscopy (LVSEM) has been driven by improved instrumentation and in particular, reliable field emission gun (FEG) SEMs. The usefulness of LVSEM has also grown because of an improved theoretical and experimental understanding of samble-beam interactions and by advances in sample preparation and operating techniques. In this study, progress in polymer LVSEM is reviewed and recent results and developments in the field are presented.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings - Annual Meeting, Microscopy Society of America |
| Publisher | Publ by San Francisco Press Inc |
| Pages | 866-867 |
| Number of pages | 2 |
| State | Published - 1993 |
| Event | Proceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA Duration: Aug 1 1993 → Aug 6 1993 |
Other
| Other | Proceedings of the 51st Annual Meeting Microscopy Society of America |
|---|---|
| City | Cincinnati, OH, USA |
| Period | 8/1/93 → 8/6/93 |
ASJC Scopus subject areas
- General Engineering