Preparation of AlGaN-based high electron mobility transistor devices using focused ion beam milling

D. A. Cullen, David Smith

Research output: Contribution to journalArticle

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)1030-1031
Number of pages2
JournalMicroscopy and Microanalysis
Volume14
Issue numberSUPPL. 2
DOIs
StatePublished - Aug 1 2008

ASJC Scopus subject areas

  • Instrumentation

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