TY - JOUR
T1 - Photochemical template removal and spatial patterning of zeolite MFI thin films using UV/ozone treatment
AU - Li, Qinghua
AU - Amweg, Meri L.
AU - Yee, Chanel K.
AU - Navrotsky, Alexandra
AU - Parikh, Atul N.
N1 - Funding Information:
This work received support from the National Science Foundation (Grant #DMR01-01391). A.N.P., M.L.A., and C.K.Y. acknowledges support through a grant from the Office of Science, US Department of Energy (DE-FG02-04ER46173).
PY - 2005/12/29
Y1 - 2005/12/29
N2 - This paper describes an application of a non-thermal, photochemical calcination process for an efficient and spatially controlled removal of the organic structure-directing agent in the preparation of thin films of microporous or zeolite materials. We prepared thin-films of a high silica zeolite (structure code: MFI) following a previously published procedure. The films were illuminated using an ozone generating short-wavelength ultraviolet light in ambient environments and characterized using Fourier-transform infrared spectroscopy, imaging ellipsometry, thin-film X-ray diffraction, and scanning electron microscopy. Results presented here indicate that the UV/ozone treatment under nominally room temperature conditions leads to complete removal of template (structure-directing-agent) from zeolite films comparable to that achieved by thermal calcination. Furthermore, spatially addressing the UV/ozone illumination pattern using a physical mask resulted in the lateral confinement of the template removal from the zeolite film leaving behind a composite film composed of templated and template-free regions. Subsequent chemical treatment of the patterned film selectively removed the as-synthesized, unexposed, regions of the film thereby providing a means for the creation of isolated zeolite film islands at predetermined locations on the substrate surface.
AB - This paper describes an application of a non-thermal, photochemical calcination process for an efficient and spatially controlled removal of the organic structure-directing agent in the preparation of thin films of microporous or zeolite materials. We prepared thin-films of a high silica zeolite (structure code: MFI) following a previously published procedure. The films were illuminated using an ozone generating short-wavelength ultraviolet light in ambient environments and characterized using Fourier-transform infrared spectroscopy, imaging ellipsometry, thin-film X-ray diffraction, and scanning electron microscopy. Results presented here indicate that the UV/ozone treatment under nominally room temperature conditions leads to complete removal of template (structure-directing-agent) from zeolite films comparable to that achieved by thermal calcination. Furthermore, spatially addressing the UV/ozone illumination pattern using a physical mask resulted in the lateral confinement of the template removal from the zeolite film leaving behind a composite film composed of templated and template-free regions. Subsequent chemical treatment of the patterned film selectively removed the as-synthesized, unexposed, regions of the film thereby providing a means for the creation of isolated zeolite film islands at predetermined locations on the substrate surface.
KW - Calcination
KW - Ellipsometric imaging
KW - Microporous thin films
KW - Patterning
KW - UV/ozone
UR - http://www.scopus.com/inward/record.url?scp=27844452910&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27844452910&partnerID=8YFLogxK
U2 - 10.1016/j.micromeso.2005.07.048
DO - 10.1016/j.micromeso.2005.07.048
M3 - Article
AN - SCOPUS:27844452910
SN - 1387-1811
VL - 87
SP - 45
EP - 51
JO - Microporous and Mesoporous Materials
JF - Microporous and Mesoporous Materials
IS - 1
ER -