Abstract
Systematic optimization of molecular beam epitaxy growth parameters enabled high quality heteroepitaxy of In2Se3 on Si(111) surfaces. Surfaces of the best epilayers were characterized by atomically flat terraces that extended laterally for several hundred nanometers. These terraces were separated by single quintuple layer high steps. These In2Se 3 films were suitable for subsequent high quality epitaxy of Bi 2Se3. The quality of the In2Se 3/Bi2Se3 interface was confirmed using atomic resolution transmission electron microscopy.
Original language | English (US) |
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Pages (from-to) | 4617-4623 |
Number of pages | 7 |
Journal | Crystal Growth and Design |
Volume | 14 |
Issue number | 9 |
DOIs | |
State | Published - Sep 3 2014 |
ASJC Scopus subject areas
- General Chemistry
- General Materials Science
- Condensed Matter Physics