Optimization of IGZO/Cu/IGZO multilayers as transparent composite electrode on flexible substrate by room-temperature sputtering and post-deposition anneals

Aritra Dhar, Terry Alford

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Highly transparent composite electrodes made of multilayers of In- and Ga-doped ZnO and Cu (IGZO/Cu/IGZO) thin films (30/3-9/30 nm thick) are deposited onto flexible substrates at room temperature and by using radio frequency magnetron sputtering. The effect of Cu thickness on the electrical and optical properties of the multilayer stack has been studied in accordance with the Cu morphology. The optical and electrical properties of the multilayers are studied with the UV-Vis spectrophotometry, Hall measurement and four point probe analyses. Results are compared with those from a single IGZO layered thin film. The average optical transmittance and sheet resistance both decreases with increase of copper thickness and has been optimized at 6 nm Cu middle layer thickness. The Haacke figure of merit (FOM) has been calculated to evaluate the performance of the films. The highest FOM achieved is 6 × 10-3 Ω-1 for a Cu thickness of 6 nm with a sheet resistance of 12.2 Ω/sq and an average transmittance of 86%. The multilayered thin films are annealed upto 150 °C in vacuum, forming gas and O2 environments and the optical and electrical properties are studied and compared against the as-deposited samples. Thus IGZO/Cu/IGZO multilayer is a promising flexible electrode material for the next-generation flexible optoelectronics.

Original languageEnglish (US)
Title of host publicationOxide Thin Films and Heterostructures for Advanced Information and Energy Technologies
PublisherMaterials Research Society
Pages48-53
Number of pages6
ISBN (Print)9781632661562
DOIs
StatePublished - Jan 1 2013
Event2013 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 1 2013Apr 5 2013

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1577
ISSN (Print)0272-9172

Other

Other2013 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/1/134/5/13

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Dhar, A., & Alford, T. (2013). Optimization of IGZO/Cu/IGZO multilayers as transparent composite electrode on flexible substrate by room-temperature sputtering and post-deposition anneals. In Oxide Thin Films and Heterostructures for Advanced Information and Energy Technologies (pp. 48-53). (Materials Research Society Symposium Proceedings; Vol. 1577). Materials Research Society. https://doi.org/10.1557/opl.2013.661