Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al 0.05 Ga 0.95 N distributed Bragg reflectors

Young Jae Park, Theeradetch Detchprohm, Karan Mehta, Jialin Wang, Hoon Jeong, Yuh Shiuan Liu, Ping Chen, Shuo Wang, Shyh Chiang Shen, P. Douglas Yoder, Fernando Ponce, Russell Dupuis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ∼270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.

Original languageEnglish (US)
Title of host publicationVertical-Cavity Surface-Emitting Lasers XXIII
EditorsKent D. Choquette, Luke A. Graham
PublisherSPIE
ISBN (Electronic)9781510625181
DOIs
StatePublished - Jan 1 2019
EventVertical-Cavity Surface-Emitting Lasers XXIII 2019 - San Francisco, United States
Duration: Feb 6 2019Feb 7 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10938
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceVertical-Cavity Surface-Emitting Lasers XXIII 2019
CountryUnited States
CitySan Francisco
Period2/6/192/7/19

Fingerprint

Distributed Bragg reflectors
Vertical-cavity Surface-emitting Laser (VCSEL)
Surface emitting lasers
Reflector
Bragg reflectors
surface emitting lasers
Mirror
Mirrors
mirrors
cavities
air
Cavity
Air
Injection lasers
Excimer Laser
injection lasers
SiO2
Excimer lasers
Reflectivity
excimer lasers

Keywords

  • Air gap
  • Distributed Bragg reflector
  • IIINitride semiconductor
  • Metalorganic chemical vapor deposition
  • Stimulated emission
  • Vertical-Cavity Surface Emission Lasers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Park, Y. J., Detchprohm, T., Mehta, K., Wang, J., Jeong, H., Liu, Y. S., ... Dupuis, R. (2019). Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al 0.05 Ga 0.95 N distributed Bragg reflectors In K. D. Choquette, & L. A. Graham (Eds.), Vertical-Cavity Surface-Emitting Lasers XXIII [109380A] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10938). SPIE. https://doi.org/10.1117/12.2510268

Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al 0.05 Ga 0.95 N distributed Bragg reflectors . / Park, Young Jae; Detchprohm, Theeradetch; Mehta, Karan; Wang, Jialin; Jeong, Hoon; Liu, Yuh Shiuan; Chen, Ping; Wang, Shuo; Shen, Shyh Chiang; Yoder, P. Douglas; Ponce, Fernando; Dupuis, Russell.

Vertical-Cavity Surface-Emitting Lasers XXIII. ed. / Kent D. Choquette; Luke A. Graham. SPIE, 2019. 109380A (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10938).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, YJ, Detchprohm, T, Mehta, K, Wang, J, Jeong, H, Liu, YS, Chen, P, Wang, S, Shen, SC, Yoder, PD, Ponce, F & Dupuis, R 2019, Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al 0.05 Ga 0.95 N distributed Bragg reflectors in KD Choquette & LA Graham (eds), Vertical-Cavity Surface-Emitting Lasers XXIII., 109380A, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10938, SPIE, Vertical-Cavity Surface-Emitting Lasers XXIII 2019, San Francisco, United States, 2/6/19. https://doi.org/10.1117/12.2510268
Park YJ, Detchprohm T, Mehta K, Wang J, Jeong H, Liu YS et al. Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al 0.05 Ga 0.95 N distributed Bragg reflectors In Choquette KD, Graham LA, editors, Vertical-Cavity Surface-Emitting Lasers XXIII. SPIE. 2019. 109380A. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2510268
Park, Young Jae ; Detchprohm, Theeradetch ; Mehta, Karan ; Wang, Jialin ; Jeong, Hoon ; Liu, Yuh Shiuan ; Chen, Ping ; Wang, Shuo ; Shen, Shyh Chiang ; Yoder, P. Douglas ; Ponce, Fernando ; Dupuis, Russell. / Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al 0.05 Ga 0.95 N distributed Bragg reflectors Vertical-Cavity Surface-Emitting Lasers XXIII. editor / Kent D. Choquette ; Luke A. Graham. SPIE, 2019. (Proceedings of SPIE - The International Society for Optical Engineering).
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abstract = "Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ∼270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.",
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AU - Wang, Jialin

AU - Jeong, Hoon

AU - Liu, Yuh Shiuan

AU - Chen, Ping

AU - Wang, Shuo

AU - Shen, Shyh Chiang

AU - Yoder, P. Douglas

AU - Ponce, Fernando

AU - Dupuis, Russell

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AB - Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ∼270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.

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