TY - JOUR
T1 - Novel Parylene-N films deposited at liquid nitrogen temperatures
AU - Erjavec, James
AU - Sikita, John
AU - Beaudoin, Stephen P.
AU - Raupp, Gregory
N1 - Funding Information:
This work was supported by a grant from the National Science Foundation and U.S. EPA, grant no. CTS-9613377. We also thank Kevin Cooper for his assistance with the SEM.
PY - 1999/6
Y1 - 1999/6
N2 - Vapor deposition polymerization of Parylene-N films at -196 °C produces optically opaque, highly porous films. Film density averaged 0.195 g/cm3, more than five times less than that of conventional non-porous Parylene-N films deposited near room temperature, which have densities of 1.11 g/cm3. Deposition rates, measured as the change in film thickness per unit time, averaged 8.3 μm/min. This rate is more than two orders of magnitude greater than the deposition rates of nonporous films near room temperature, at otherwise fixed conditions of monomer delivery rate and deposition chamber pressure. On a mass deposition rate basis, the new low temperature film deposition rate is more than an order of magnitude faster than the corresponding rate at room temperature.
AB - Vapor deposition polymerization of Parylene-N films at -196 °C produces optically opaque, highly porous films. Film density averaged 0.195 g/cm3, more than five times less than that of conventional non-porous Parylene-N films deposited near room temperature, which have densities of 1.11 g/cm3. Deposition rates, measured as the change in film thickness per unit time, averaged 8.3 μm/min. This rate is more than two orders of magnitude greater than the deposition rates of nonporous films near room temperature, at otherwise fixed conditions of monomer delivery rate and deposition chamber pressure. On a mass deposition rate basis, the new low temperature film deposition rate is more than an order of magnitude faster than the corresponding rate at room temperature.
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U2 - 10.1016/S0167-577X(99)00031-2
DO - 10.1016/S0167-577X(99)00031-2
M3 - Article
AN - SCOPUS:0032665855
SN - 0167-577X
VL - 39
SP - 339
EP - 342
JO - Materials Letters
JF - Materials Letters
IS - 6
ER -