Vapor deposition polymerization of Parylene-N films at -196 °C produces optically opaque, highly porous films. Film density averaged 0.195 g/cm3, more than five times less than that of conventional non-porous Parylene-N films deposited near room temperature, which have densities of 1.11 g/cm3. Deposition rates, measured as the change in film thickness per unit time, averaged 8.3 μm/min. This rate is more than two orders of magnitude greater than the deposition rates of nonporous films near room temperature, at otherwise fixed conditions of monomer delivery rate and deposition chamber pressure. On a mass deposition rate basis, the new low temperature film deposition rate is more than an order of magnitude faster than the corresponding rate at room temperature.
ASJC Scopus subject areas
- Materials Science(all)