Non-contact probes for on-wafer characterization of sub-millimeter-wave devices and integrated circuits

Cosan Caglayan, Georgios Trichopoulos, Kubilay Sertel

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

We present a novel non-contact metrology approach for on-wafer characterization of sub-millimeter-wave devices, components, and integrated circuits. Unlike existing contact probes that rely on small metallic tips that make physical contact with the device on the chip, the new non-contact probes are based on electromagnetic coupling of vector network analyzer (VNA) test ports into the coplanar waveguide environment of integrated devices and circuits. Efficient signal coupling is achieved via a quasi-optical link between the VNA ports and planar antennas that are monolithically integrated with the test device. Experimental validation of the non-contact device metrology system is presented for the first time to demonstrate the accuracy and repeatability of proposed approach for the 325-500-GHz (WR2.2) and 500-750-GHz (WR1.5) bands.

Original languageEnglish (US)
Article number6901300
Pages (from-to)2791-2801
Number of pages11
JournalIEEE Transactions on Microwave Theory and Techniques
Volume62
Issue number11
DOIs
StatePublished - Nov 1 2014
Externally publishedYes

Fingerprint

Millimeter wave devices
Submillimeter waves
submillimeter waves
Electric network analyzers
integrated circuits
Integrated circuits
wafers
Electromagnetic coupling
Optical links
probes
Coplanar waveguides
metrology
Antennas
analyzers
Networks (circuits)
electromagnetic coupling
antennas
chips
waveguides

Keywords

  • Measurement techniques
  • millimeter-wave (mmW) measurements
  • mmW technology
  • sub-mmW measurements
  • sub-mmW propagation
  • sub-mmW technology

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Radiation

Cite this

Non-contact probes for on-wafer characterization of sub-millimeter-wave devices and integrated circuits. / Caglayan, Cosan; Trichopoulos, Georgios; Sertel, Kubilay.

In: IEEE Transactions on Microwave Theory and Techniques, Vol. 62, No. 11, 6901300, 01.11.2014, p. 2791-2801.

Research output: Contribution to journalArticle

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