Nanopore patterning using Al<inf>2</inf>O<inf>3</inf> hard masks on SOI substrates

Xiaofeng Wang, Michael Goryll

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Fingerprint Dive into the research topics of 'Nanopore patterning using Al<inf>2</inf>O<inf>3</inf> hard masks on SOI substrates'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science