Nanodynamics of vapor-phase organophosphates on silicon and OTS for lubrication purposes

W. Weeyakorn; S. M. Lee; O. Parker; J. E. Burnette; L. S. Bilbro; R. J. Nemanich; J. Krim

Nanodynamics of vapor-phase organophosphates on silicon and OTS for lubrication purposes

W. Weeyakorn, S. M. Lee, O. Parker, J. E. Burnette, L. S. Bilbro, R. J. Nemanich, J. Krim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have performed a quartz crystal microbalance (QCM) study of the nanotribological properties of organophosphate (tricresylphosphate and t-butyl phenylphosphate) layers adsorbed from the vapor phase onto silicon (amorphous silicon and MEMS-like polysilicon), and octadecyltrichlorosilane (OTS) treated silicon and gold surfaces. The latter systems have been studied in order to explore whether organophosphates and OTS in combination might prove synergistic from a tribological point of view [1]. There is a strong possibility that this combination will also exhibit synergistic tribological behaviors when tested on actual MEMS devices. Therefore, it is important to perform QCM measurement on silicon that is as close to that of MEMS devices. In order to perform this study, we have developed a deposition method involving a Si-Ge layer that enables the growth of polycrystalline silicon on top of Cu QCM electrodes. The structural and morphological properties of these samples have been characterized with Raman spectroscopy and atomic force microscopy (AFM), confirming that they are similar in nature to the silicon in actual MEMS devices.

Original language	English (US)
Title of host publication	Proceedings of the World Tribology Congress III - 2005
Pages	793-794
Number of pages	2
State	Published - Dec 1 2005
Externally published	Yes
Event	2005 World Tribology Congress III - Washington, D.C., United States Duration: Sep 12 2005 → Sep 16 2005

Publication series

Name	Proceedings of the World Tribology Congress III - 2005

Other

Other	2005 World Tribology Congress III
Country/Territory	United States
City	Washington, D.C.
Period	9/12/05 → 9/16/05

ASJC Scopus subject areas

General Engineering

Cite this

Weeyakorn, W, Lee, SM, Parker, O, Burnette, JE, Bilbro, LS, Nemanich, RJ & Krim, J 2005, Nanodynamics of vapor-phase organophosphates on silicon and OTS for lubrication purposes. in Proceedings of the World Tribology Congress III - 2005. Proceedings of the World Tribology Congress III - 2005, pp. 793-794, 2005 World Tribology Congress III, Washington, D.C., United States, 9/12/05.

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abstract = "We have performed a quartz crystal microbalance (QCM) study of the nanotribological properties of organophosphate (tricresylphosphate and t-butyl phenylphosphate) layers adsorbed from the vapor phase onto silicon (amorphous silicon and MEMS-like polysilicon), and octadecyltrichlorosilane (OTS) treated silicon and gold surfaces. The latter systems have been studied in order to explore whether organophosphates and OTS in combination might prove synergistic from a tribological point of view [1]. There is a strong possibility that this combination will also exhibit synergistic tribological behaviors when tested on actual MEMS devices. Therefore, it is important to perform QCM measurement on silicon that is as close to that of MEMS devices. In order to perform this study, we have developed a deposition method involving a Si-Ge layer that enables the growth of polycrystalline silicon on top of Cu QCM electrodes. The structural and morphological properties of these samples have been characterized with Raman spectroscopy and atomic force microscopy (AFM), confirming that they are similar in nature to the silicon in actual MEMS devices.",

author = "W. Weeyakorn and Lee, {S. M.} and O. Parker and Burnette, {J. E.} and Bilbro, {L. S.} and Nemanich, {R. J.} and J. Krim",

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AU - Weeyakorn, W.

AU - Lee, S. M.

AU - Parker, O.

AU - Burnette, J. E.

AU - Bilbro, L. S.

AU - Nemanich, R. J.

AU - Krim, J.

PY - 2005/12/1

Y1 - 2005/12/1

N2 - We have performed a quartz crystal microbalance (QCM) study of the nanotribological properties of organophosphate (tricresylphosphate and t-butyl phenylphosphate) layers adsorbed from the vapor phase onto silicon (amorphous silicon and MEMS-like polysilicon), and octadecyltrichlorosilane (OTS) treated silicon and gold surfaces. The latter systems have been studied in order to explore whether organophosphates and OTS in combination might prove synergistic from a tribological point of view [1]. There is a strong possibility that this combination will also exhibit synergistic tribological behaviors when tested on actual MEMS devices. Therefore, it is important to perform QCM measurement on silicon that is as close to that of MEMS devices. In order to perform this study, we have developed a deposition method involving a Si-Ge layer that enables the growth of polycrystalline silicon on top of Cu QCM electrodes. The structural and morphological properties of these samples have been characterized with Raman spectroscopy and atomic force microscopy (AFM), confirming that they are similar in nature to the silicon in actual MEMS devices.

AB - We have performed a quartz crystal microbalance (QCM) study of the nanotribological properties of organophosphate (tricresylphosphate and t-butyl phenylphosphate) layers adsorbed from the vapor phase onto silicon (amorphous silicon and MEMS-like polysilicon), and octadecyltrichlorosilane (OTS) treated silicon and gold surfaces. The latter systems have been studied in order to explore whether organophosphates and OTS in combination might prove synergistic from a tribological point of view [1]. There is a strong possibility that this combination will also exhibit synergistic tribological behaviors when tested on actual MEMS devices. Therefore, it is important to perform QCM measurement on silicon that is as close to that of MEMS devices. In order to perform this study, we have developed a deposition method involving a Si-Ge layer that enables the growth of polycrystalline silicon on top of Cu QCM electrodes. The structural and morphological properties of these samples have been characterized with Raman spectroscopy and atomic force microscopy (AFM), confirming that they are similar in nature to the silicon in actual MEMS devices.

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M3 - Conference contribution

AN - SCOPUS:33144463024

SN - 0791842029

T3 - Proceedings of the World Tribology Congress III - 2005

SP - 793

EP - 794

BT - Proceedings of the World Tribology Congress III - 2005

T2 - 2005 World Tribology Congress III

Y2 - 12 September 2005 through 16 September 2005

ER -

Nanodynamics of vapor-phase organophosphates on silicon and OTS for lubrication purposes

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