Multi-cantilever-driven rotational micrograting for MOEMS spectrometer

Joe F. Lo, Shih Jui Chen, Hongyu Yu, Derrick Chi, Chuang Yuan Lee, Laura Marcu, Eun Sok Kim, Martin Gundersen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2421-2424
Number of pages4
DOIs
StatePublished - 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period6/10/076/14/07

Fingerprint

MOEMS
Diffraction gratings
Spectrometers
Actuators
Fluorescence
Scanning
Fluorescence spectroscopy
Cellulose
Dyes
Tuning
Fabrication
Fibers
Electric potential
Design optimization

Keywords

  • Cantilever
  • Diffraction
  • Fluorescence
  • Grating
  • Piezoelectric
  • Rotational actuation
  • Spectrometer

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Lo, J. F., Chen, S. J., Yu, H., Chi, D., Lee, C. Y., Marcu, L., ... Gundersen, M. (2007). Multi-cantilever-driven rotational micrograting for MOEMS spectrometer. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2421-2424). [4300659] https://doi.org/10.1109/SENSOR.2007.4300659

Multi-cantilever-driven rotational micrograting for MOEMS spectrometer. / Lo, Joe F.; Chen, Shih Jui; Yu, Hongyu; Chi, Derrick; Lee, Chuang Yuan; Marcu, Laura; Kim, Eun Sok; Gundersen, Martin.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2421-2424 4300659.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lo, JF, Chen, SJ, Yu, H, Chi, D, Lee, CY, Marcu, L, Kim, ES & Gundersen, M 2007, Multi-cantilever-driven rotational micrograting for MOEMS spectrometer. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300659, pp. 2421-2424, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 6/10/07. https://doi.org/10.1109/SENSOR.2007.4300659
Lo JF, Chen SJ, Yu H, Chi D, Lee CY, Marcu L et al. Multi-cantilever-driven rotational micrograting for MOEMS spectrometer. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2421-2424. 4300659 https://doi.org/10.1109/SENSOR.2007.4300659
Lo, Joe F. ; Chen, Shih Jui ; Yu, Hongyu ; Chi, Derrick ; Lee, Chuang Yuan ; Marcu, Laura ; Kim, Eun Sok ; Gundersen, Martin. / Multi-cantilever-driven rotational micrograting for MOEMS spectrometer. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 2421-2424
@inproceedings{95c0a606e04544f5bbb369440eeb8510,
title = "Multi-cantilever-driven rotational micrograting for MOEMS spectrometer",
abstract = "For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.",
keywords = "Cantilever, Diffraction, Fluorescence, Grating, Piezoelectric, Rotational actuation, Spectrometer",
author = "Lo, {Joe F.} and Chen, {Shih Jui} and Hongyu Yu and Derrick Chi and Lee, {Chuang Yuan} and Laura Marcu and Kim, {Eun Sok} and Martin Gundersen",
year = "2007",
doi = "10.1109/SENSOR.2007.4300659",
language = "English (US)",
isbn = "1424408423",
pages = "2421--2424",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

}

TY - GEN

T1 - Multi-cantilever-driven rotational micrograting for MOEMS spectrometer

AU - Lo, Joe F.

AU - Chen, Shih Jui

AU - Yu, Hongyu

AU - Chi, Derrick

AU - Lee, Chuang Yuan

AU - Marcu, Laura

AU - Kim, Eun Sok

AU - Gundersen, Martin

PY - 2007

Y1 - 2007

N2 - For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.

AB - For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.

KW - Cantilever

KW - Diffraction

KW - Fluorescence

KW - Grating

KW - Piezoelectric

KW - Rotational actuation

KW - Spectrometer

UR - http://www.scopus.com/inward/record.url?scp=50049126051&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=50049126051&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2007.4300659

DO - 10.1109/SENSOR.2007.4300659

M3 - Conference contribution

AN - SCOPUS:50049126051

SN - 1424408423

SN - 9781424408429

SP - 2421

EP - 2424

BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

ER -