Multi-cantilever-driven rotational micrograting for MOEMS spectrometer

Joe F. Lo, Shih Jui Chen, Hongyu Yu, Derrick Chi, Chuang Yuan Lee, Laura Marcu, Eun Sok Kim, Martin Gundersen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2421-2424
Number of pages4
DOIs
StatePublished - 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period6/10/076/14/07

Keywords

  • Cantilever
  • Diffraction
  • Fluorescence
  • Grating
  • Piezoelectric
  • Rotational actuation
  • Spectrometer

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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