@inproceedings{95c0a606e04544f5bbb369440eeb8510,
title = "Multi-cantilever-driven rotational micrograting for MOEMS spectrometer",
abstract = "For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.",
keywords = "Cantilever, Diffraction, Fluorescence, Grating, Piezoelectric, Rotational actuation, Spectrometer",
author = "Lo, {Joe F.} and Chen, {Shih Jui} and Hongyu Yu and Derrick Chi and Lee, {Chuang Yuan} and Laura Marcu and Kim, {Eun Sok} and Martin Gundersen",
year = "2007",
doi = "10.1109/SENSOR.2007.4300659",
language = "English (US)",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "2421--2424",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}