Modelling and analysis of semiconductor manufacturing in a shrinking world: Challenges and successes

Chen Fu Chien, Stéphane Dauzère-Pérès, Hans Ehm, John Fowler, Zhibin Jiang, Shekar Krishnaswamy, Tae Eog Lee, Lars Mönch, Reha Uzsoy

Research output: Contribution to journalArticlepeer-review

70 Scopus citations

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Engineering & Materials Science